CMS, authorized by the previous National Bureau of Standards (now as Bureau of Standards, Metrology & Inspection) of the Ministry of Economic Affairs, was founded by the Industrial Technology Research Institute (ITRI) in 1985. CMS is now positioned as a linkage center of ITRI, aiming to integrate technology from across ITRI's laboratories to create value-added research. The organization is structured to execute different functions of planning and promotion, measurement standards and technology development, measurement standards & legal metrology development, instrumentation & sensing technology development, metrology verification and innovation application, medical device evaluation, and pioneering sensing technology.

Looking into the future, globalization of economies and free trade agreements all rely on the technical infrastructure established in the aspect of scientific, legal, and industrial metrology. CMS will retain its goal to meet industrial needs and continue the efforts on pioneering research and instrument development. With the improved measurement standards and advanced technologies, CMS will accelerate its pace to upgrade the quality of industry and contribute to the nation's economic growth in the 21st century.