Precision Machinery and MEMS

ITRI has combined technical applications of electrical engineering, measurement, aviation and space and automation to develop the core technologies for nanoscale manufacturing, Micro Electro-Mechanical System (MEMS), precision machinery, semiconductor process equipment, products and process precision measurement, electrical machinery, powertrain systems, and aviation vehicle structure and aviation telecommunications.

ITRI will continue frontier research in precision machinery and microelectrical technology to promote the integration and upgrading of precision machinery, MEMS, microelectronics, optoelectronics, and biomedical industries, as to create new industry.

For more items related to this topic, please view ITRI's specific laboratory websites, i.e. Mechanical Industrial Research Laboratories (MIRL), Electronics Research & Service Organization (ERSO), Center for Measurement Standards (CMS), or contact directly with Energy & Resources Laboratories (ERL) or Center for Aerospace and System Technology (CAST), etc.