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工業技術研究院

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電容式微型壓力計

技術簡介

 電容式微型壓力計。
電容式微型壓力計。

本電容式壓力計技術具有低耗能、微型化與高輸出解析度之特色,以創新之絕對式壓力計結構與MEMS加工方法之專利設計(已獲證),配合低雜訊電容訊號處理與適應性溫度補償電路,使本產品技術具備智慧化校正與溫度補償之附加功能。

特色與創新

本技術具專利結構設計,且可依需求客製化壓力感測範圍。

技術特色
  • 過載保護。
  • 可依需求製作成絕對壓力式/相對壓力式。
  • 內建參考電容。
技術規格
  • Range: 30~110 kPa。
  • Sensitivity: 1.5 mV/10 Pa。
  • RMS noise: 1 Pa。

應用與效益

本技術可應用於手機/平板、穿戴式裝置、汽車導航、胎壓監測、安全監控、人員追蹤等。

電容式微型壓力計。
電容式微型壓力計。



延伸閱讀
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