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工業技術研究院

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標準件

技術簡介

 階高標準件(5μm<H<200μm)。
階高標準件(5μm<H<200μm)。

  • 階高標準件:高度為10nm~200μm(均勻性<4%,準確度<5nm~0.1%)。
  • 表粗標準件:Ra為5 nm~10μm(準確度<5nm~0.1%)。
  • 線距標準件:線距為 ≧ 2μm(準確度<0.1%)。
  • 影像標準件:範圍50mm×50mm~400mm×400mm(客製化)。
階高標準件(10nm<H<30μm)。
階高標準件(10nm<H<30μm)。
表粗標準件(5nm<H<100μm)。
表粗標準件(5nm<H<100μm)。
線距標準件(pitch>2μm)。
線距標準件(pitch>2μm)。
影像標準件(50mm×50 mm~400mm×400mm)。
影像標準件(50mm×50 mm~400mm×400mm)。


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