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工業技術研究院

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高潔淨室環境用無人搬運車

技術簡介

高潔淨室環境用無人搬運車技術開發,結合單晶片控制器、磁感測模組與驅動控制模組等關鍵模組技術,開發國產化磁帶導引式高潔淨室無人搬運車,並通過半導體製造設備環境衛生安全(SEMI S2)認證。

特色與創新

  • 半導體製造設備環境衛生安全(SEMI S2)認證:唯一國產AGV通過SGS SEMI S2認證。
  • 輕載型AGV:整機系統與關鍵零組件國產自製,具雙向移動、原地旋轉功能,適合於狹小空間運行。
  • 多核心控制器:以單晶片系統為控制核心,多工處理不同周邊感測器,達成即時運動控制。

應用與效益

  • 發展關鍵核心模組扶植自動化設備業者,協助廠商落實產品開發,建構運載機器人上/中/下游產業鏈。
  • 國內已30餘家次導入無人搬運車系統製造生產線,促成業者投資總計3億7仟萬元,如汽車製造業、金屬製造業、自動化設備與系統整合業者、生技與醫療產業、電子產業等。
高潔淨室無人搬運車/半導體製造設備環境衛生安全基準
高潔淨室無人搬運車/半導體製造設備環境衛生安全基準。
無人搬運車規格
無人搬運車規格。


延伸閱讀
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