工業技術研究院

技術簡介

本發明係有關於一種應用於生醫檢測的感測裝置，藉由保護層與鈍化層的設置，光致發光及非特異性吸附的問題皆獲得改善

Abstract

The present invention provides a sensing device. The sensing device includes a substrate, a protective layer, a passivation layer, and a hole. The substrate has an upper surface. The protective layer is disposed on the substrate and is in contact with the upper surface. The passivation layer is disposed on the protective layer. The hole passes through the passivation layer, the protective layer, and a portion of the substrate.

技術規格

本發明提供了一種感測裝置。所述感測裝置包括一基板、一保護層、一鈍化層以及一孔洞。基板具有一上表面。保護層設置於基板上，且接觸於上表面。鈍化層設置於保護層上。孔洞穿過鈍化層、保護層及一部分的基板。

Technical Specification

The present invention provides a sensing device. The sensing device includes a substrate, a protective layer, a passivation layer, and an opening. The substrate has an upper surface. The protective layer is disposed on the substrate and is in contact with the upper surface. The passivation layer is disposed on the protective layer. The opening penetrates through the passivation layer, the protective layer, and a portion of the substrate.

技術特色

本發明係有關於一種應用於生醫檢測的感測裝置，藉由保護層與鈍化層的設置，光致發光及非特異性吸附的問題皆獲得改善

應用範圍

生醫感測裝置及其製作方法

接受技術者具備基礎建議（設備）

晶片表面清洗與層積設備

接受技術者具備基礎建議（專業）

化學相關背景

聯絡資訊