Your web browser does not support JavaScript, but it does not affect browsing through the rest of the web site.

Prognostic and Health Management Technology for MOCVD Equipment

Font size:
Small
Medium
Large

Prognostic and Health Management Technology for MOCVD Equipment

To help improve a company’s competitive edge in the optoelectronic industry and nurture information service providers’ big data analyzing capabilities, ITRI has been devoted to developing prognostic and health management technology for metal organic chemical vapor deposition (MOCVD) equipment. Big data algorithms analyze fabrication process data collected from equipment and processes, generate results, and predict the probability of failure of critical components, which include mass flow controllers and particle filters. This predictive information is valuable for decisions regarding preventive component replacement and maintenance works. In terms of predicting particle filter failure, 100% accuracy rate has been achieved with a small 14% false positive rate. A 9% discrepancy has also been demonstrated in the prediction of component residual service life.

Prognostic and Health Management Technology for MOCVD Equipment
Prognostic and Health Management Technology for MOCVD Equipment

Contact

Sarah Cheng

Email: sarah_cheng@itri.org.tw