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Industrial Technology Research Institute

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Microwave Annealing Technology - CINmat

Technology Overview

Microwave Annealing Technology—CINmat.
Microwave Annealing Technology—CINmat.

Teaming up with National Chiao Tung University and the National Nano Device Laboratories (NDL), ITRI has developed CINmat for dopant activation for multiple wafers. Now, near non-diffusion could be achieved during annealing by integrating “low-frequency multi-modes” with “microwave restricting” technology to develop accurate and effective low-frequency microwave annealing technology. The uniformity of a single wafer would thus increase from 95% to 99.5%, which is better than the 99% requirement of domestic semiconductor manufacturers. 

Applications & Benefits

This technology received an R&D 100 Award in 2017 and can be applied to the optoelectronic industry in future.