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Industrial Technology Research Institute

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MEMS process integration technology

Technology Overview

Smart sensor process integration trial production platform.
Smart sensor process integration trial production platform.

Based on the smart sensors required for smart manufacturing and sensing the Internet of Things, combined with smart sensor R & D and trial production energy, integrating sensor design, trial production, providing sensor prototype development trial production and trial production. To accelerate the development of key sensing technologies for the industry.

Positioning domestic smart sensors and innovative product development / rapid trial production / trial production, providing infrastructure / environment and professional technical services to help the industry create business opportunities.

Applications & Benefits

Integrate the advantages of semiconductor manufacturing to assist the smart manufacturing and sensing IoT industries to create industrial value-added through the development of key sensors.