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Industrial Technology Research Institute

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Epitaxy Optimum Coupling System (EOCS)

Technology Overview

Epitaxy Optimum Coupling System (EOCS).
Epitaxy Optimum Coupling System (EOCS).

Epitaxy Optimum Coupling System (EOCS), a digitized system for Metal-Organic Chemical Vapor Deposition epitaxy, is a technique for depositing ultrathin layers on a substrate to build LED materials, semiconductor wafers and other microelectronic components.

Applications & Benefits

This system accelerates time to market for LED and semiconductor products compared to the current conventional manual system.

Epitaxy Optimum Coupling System (EOCS) - ITRI

Epitaxy Optimum Coupling System (EOCS), a digitized system for Metal-Organic Chemical Vapor Deposition epitaxy, is a technique for depositing ultrathin layers on a substrate to build LED materials, semiconductor wafers and other microelectronic components.