Technology Overview
High-Sensitivity Liquid Particle Counter Sensing Module helps reduce electroplating defects by 20%.
High-precision IC substrate manufacturing involves repeated electroplating and rinsing, where microparticle counts in aqueous solutions critically affect yield. Most commercial liquid microparticle sensors are designed for laboratory use, requiring manual sampling and offline analysis, which limits their suitability for real-time production line monitoring. In addition, the diverse chemical solutions used in IC substrate processes often introduce color interference that compromises optical measurements, leading to inaccurate detections.
Applications & Benefits
The High-Sensitivity Liquid Particle Counter Sensing Module addresses these issues by combining highsensitivity liquid microparticle sensing with color compensation technology. It monitors optical absorptivity changes to prevent tank solution colorinduced interference in particle size determination. The technology can detect microparticles sized 1–5 μm with a counting error below 10%. Compared to traditional sensors, it offers high sensitivity and adaptability to various production environments, enabling direct deployment on production lines for continuous monitoring. The technology has been implemented in Taiwan’s ABF substrate plants, helping reduce electroplating defects by 20%. Its application in panel cleaning processes allows for precise control of circulating water quality, boosting yields and elevating the automated monitoring capabilities for substrate wet processes.