Technology Overview
HEAD-Matrix ALD+ System
The semiconductor production process is complex, and each process requires the use of special equipment. Advanced wafer deposition precision requirements are becoming increasingly stringent. During the process of conversion, transporting wafers between semiconductor production machines is time-consuming and often risks contamination and compromised quality. ITRI has developed the HEAD-Matrix ALD+ System, which combines the coating process into an all-in-one chamber. The nanofilm for 3D high aspect ratio structure with high quality, productivity, and multicomponent uniformity is carried out by reducing transmission pollution.
Applications & Benefits
This technology is projected to boost Taiwan’s production rate from 30% to over 60% and shorten the maintenance period from 7 days to just 1 day. The HEAD-Matrix ALD+ System won a 2023 R&D 100 Award.