Technology Overview
Plasma Solid Gas Source Module.
To minimize Global Warming Potential (GWP), it is crucial to adopt low-GWP fluorinated compounds such as COF2 and F2 in semiconductor processes. ITRI's Plasma Solid Gas Source Module replaces high-GWP gases such as CF4 with solid polymer materials, achieving a 33% reduction in carbon equivalent emissions.
Applications & Benefits
ITRI has collaborated with major PCB manufacturers on pilot trials and carbon reduction verification. It has also partnered with electronic equipment manufacturers to integrate module technology and adopt new low-GWP fluorine-containing gas sources. By reducing carbon emissions, the module enhances the semiconductor processes and creates sustainable value across the industry chain.