服務說明
掃瞄探針顯微鏡--SPM(AFM、STM、MFM)
可針對8吋晶圓以下的試片進行探針掃瞄顯微量測,依不同的探針使用可進行多種物理特性的量測。
服務項目
- topography
- dielectric properties
- contact potential,electric dipole moment
- magnetic domain
- Dopant
- conductivity
- probe lithography
規格
- scanning range:90μm × 90μm × 6μm
- resolution:X axis and Y axis are 2 nm;Z axis is 0.05 nm;nonlearity < 1%
- specimen size:200 mm (diameter) x 12 mm (thicjness)
應用
- AFM Contact Mode, Tapping Mode, Non-contact Mode
- Lateral Force Microscopy (LFM)
- Visco-elastic AFM
- Magnetic Force Microscopy (MFM)
- Kelvin Force Microscopy(KFM or Scanning Surface Potential Microscopy,SSPM)
- Conductive AFM
- Scanning Capacitance Microscopy (SCM)
- Nanolithography
真空控溫型掃描探針顯微鏡--SPM(AFM、STM、MFM)
可改變試片的環境條件,真空至10^-6 torr,溫度範圍-120℃至400℃(加熱最高可至800℃)。僅限於2.5cm x 1 cm試片。依不同的探針使用可進行多種物理特性的量測。
服務項目
- topography
- dielectric properties
- contact potential,electric dipole moment
- magnetic domain
- Dopant
- conductivity
- probe lithography
規格
- scanning range:150μm × 150μm × 6μm
- resolution:both of the X axis and Y axis are 1 nm;Z axis is 5 nm
- specimen size:2.5 cm (diameter) x 1.0 cm (thickness)
應用
- AFM Contact Mode, Tapping Mode, Non-contact Mode
- Lateral Force Microscopy (LFM)
- Visco-elastic AFM
- Magnetic Force Microscopy (MFM)
- Kelvin Force Microscopy (KFM or Scanning Surface Potential Microscopy,SSPM)
- Conductive AFM
- Scanning Capacitance Microscopy (SCM)
- Nanolithography
本儀器是New generation AFM作用力<50 pN,接觸面積遠小於傳統AFM,不會刮傷樣品(適用於軟物質)、液態中可以穩定掃描、可整合光學系統(Raman,螢光…)、電極表面電位量測、奈米定量力學及電學特性量測、高速掃描功能。
服務項目
- Topography
- Nanomechanics
- Imaging in liquid
- Force mapping
- Raman mapping
規格
- scanning range:150 μm × 150 μm × 20 μm
- image resolution: X and Y axis are 2 nm ; height noise :< 0.1 nm RMS (air), < 0.2 nm RMS (fluid)
- force resolution:10 pN RMS for cantilever with k = 20 pN/nm
- specimen size:1 × 3 inch slides, 25 mm coverslips, 35 and 60 mm plastic petri dishes
應用
- AFM Contact Mode, Tapping Mode, Non-contact Mode, Peak Force Mode
- Phase Imaging
- PeakForce Quantitative Nanomechanical Property Mapping (QNM)
- Force Volume
- Nano-Indentation
- Integrated AFM-Raman Imaging System(IRIS)
- Microscope Image Registration and Overlay(MIRO)
本儀器是New generation AFM作用力<50 pN,接觸面積遠小於傳統AFM,不會刮傷樣品(適用於軟物質)、液態中可以穩定掃描、可整合光學系統(Raman,螢光…)、電極表面電位量測、奈米定量力學及電學特性量測、高速掃描功能。
服務項目
- Topography
- Nano-mechanics
- Fastscan
- Force mapping
- surface potential
- surface magnetic property
- Nano-conductivity
規格
- scanning range:90 μm × 90 μm × 10 μm
- resolution: X axis and Y axis are 2 nm ; vertical noise: <40 pm RMS
- speed: X-Y tip-velocity max.: > 2 mm/Sec.; Z tip-velocity max.: 12 mm/Sec
- specimen size:210 mm(diameter) x 15 mm(thickness)
應用
- AFM Contact Mode, Tapping Mode, Non-contact Mode, Peak Force Mode
- Phase Imaging
- PeakForce Quantitative Nanomechanical Property Mapping(QNM)
- Force Volume
- Nano-Indentation
- Integrated AFM-Raman Imaging System(IRIS)
- Microscope Image Registration and Overlay(MIRO)
本儀器是具有近場光學、共焦及原子力等三種功能合一的顯微鏡,可針對3.5英吋以下之試片進行近場光學影像檢測以及表面形貌量測。
服務項目
- topography
- dielectric properties
- contact potential,electric dipole moment
- magnetic domain
- Dopant
- conductivity
- probe lithography
規格
- 0.2 cps to 2x1012 cps:
- Complete analysis from 0.1 fg.g-1 to 0.1% (LR, solution)
- Minimum integration time:
- Counting: 0.1 ms
- Analog: 1 ms
- Faraday: 1 ms
- No decay time with Faraday detection system:
- Specially designed integration circuit
- Automatic switching between detection modes:
- no preset
- < 1 ms to Faraday detection