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工業技術研究院

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微型氣體感測技術

技術簡介

 微型氣體感測技術。
微型氣體感測技術。

開發抗熱應力、高均溫之MEMS微加熱器,加載薄膜式金屬氧化物感測材料,並整合可程式溫控及感測電路晶片於同一封裝體內,濃度偵測極限達ppb等級,具備微型化、數位化、超低功耗與高穩定性等優勢。

特色與創新

MEMS微型加熱器加載薄膜感材,結合創新寬域高精度感測電路,達到微濃度偵測極限。

技術特色
  • 抗熱應力/高均溫微加熱器結構。
  • 專利可程式溫控電路。
  • 專利寬域高精度感測電路。
  • 薄膜式感測材料及加載技術。
技術規格
  • TVOC Range:0~3000 ppb。
  • Ethanol Range:0.5~500 ppm。
  • CO Range:0.1~400ppm。
  • DC Power Consumption:< 50mW。

應用與效益

可應用於居家照護、工商產業、公共環境維安、健康管理、醫療安全、物聯網環境感測等領域。

微型數位式氣體感測器。
微型數位式氣體感測器。



延伸閱讀
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