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工業技術研究院

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電子級溶劑綠色循環技術

技術簡介

 電子級溶劑綠色循環技術。
電子級溶劑綠色循環技術。

國內半導體及光電產業居世界領導地位,對高階製程化學助劑如蝕刻、清洗等溶劑之品質與需求量均高。工研院以典型化工分離技術為基礎,開發電子級溶劑純化專用之分壁式蒸餾(Dividing-Wall distillation Column;DWC)綠色循環技術,具純度品質穩定、回收率高與能耗低等優勢,並首創於電子材料廠線上使用,大幅改善高價溶劑損耗與場外回收品質不良的困境。

特色與效益

此技術適用於鋰電池、薄膜材料廠之溶劑排氣,與晶圓及面板廠之光阻剝離、稀釋劑的循環純化,經實廠應用驗證,除了大幅改善污排外,系統運轉成本低於新品溶劑價格50%,預估無論規模大小都可在二年內回收投資。此技術商業運轉案例已達四家七案,直接效益一年達12億元。



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