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工業技術研究院

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表面與薄膜量測

服務說明

 FE-AES
FE-AES

應用於奈米材料的微結構分析,並具有多種功能:塊材、粉末、薄膜結晶相鑑定、磊晶膜品質、晶格匹配性鑑定、多層膜厚度、界面粗糙度量測、孔隙性薄膜孔隙度分布量測。

服務項目

  • 晶相鑑定分析(Phase identification analysis)
  • 晶格常數分析(Lattice constant analysis)
  • 晶粒度分析(grain size analysis)

規格

  • X-ray generator
    • Max. output power : 3.0 kW
    • Max. high voltage: 60 kV
    • Max. anode current: 60 mA
    • Stability (HV and anode current): < 0.01% per 10% mains fluctuation
    • Ripple: < 2% peak to peak
  • goniometer radius : between 130 and 240 mm

 

場發射歐傑電子能譜儀(FE-AES)

本設備執行奈米材料表面及薄膜分析,含EDS、TA-XPS、BEI、REELS、SEM、AR-AES等功能。試片可加溫至600℃以上、影像解析度6nm、成分影像解析度9nm、縱深解析度1nm。

服務項目
Properties analysis from 0.1nm surface to several μm depth

  • Elemental、composition、thickness chemical bonding interface/depth profiling analysis
  • allotrope identify
  • Atomic level、work function analysis
  • non-reconstructive surface Elemental、composition、thickness chemical bonding interface/depth profiling analysis

規格

  • image resolution  :7 nm
  • element resolution :12 nm
  • depth resolution :1 nm
  • Energy  resolution ~0.05%
  • spectrum、line  scan、mapping  element analysis with 0.1~1μm depth

應用

  • EDS、BEI system:element、image contract analysis at 1 μm depth
  • UHV specimen chamber:temperature controller range from room temperature to 900 ºK
  • 3.XPS、(R)EELS systme: chemical state analysis

 

 μ-ESCA
μ-ESCA

微區化學分析電子譜儀(μ-ESCA)

本分析儀提供多材質奈米材料分析,含“0.1奈米起至數微米深度”之元素、含量、厚度、化態、介面、縱深分析、同素異形體鑑定&分析。

服務項目

  • Elemental、composition、thickness chemical bonding interface/depth profiling analysis
  • allotrope identify
  • Atomic level、work function analysis
  • non-reconstructive surface Elemental、composition、thickness chemical bonding interface/depth profiling analysis

規格

  • image resolution <95  nm(SEM)
  • element resolution 3 μm(ESCA)
  • depth resolution 1 nm
  • chemical state analysis(Analyser ΔE<25  meV)、spectrum、line  scan、mapping  element analysis with 0.1~1μm depth

應用

  • FE-AES:To resolve the composition and imaging analysis from surface to 100nm depth.
    UHV specimen preparation Chamber:TEMP. range: 170~1000 ºK
  • ISS system:to resolve surface monolayer composition analysis
  • UPS system:to resolve valence band and band gap analysis
  • TA-XPS:to assist the peak overlap analysis with monochromator (Al target)

 

 TF-XRD
TF-XRD

薄膜X光繞射儀(TF-XRD)

應用於奈米材料的微結構分析,並具有多種功能:塊材、粉末、薄膜結晶相鑑定、磊晶膜品質、晶格匹配性鑑定、多層膜厚度、界面粗糙度量測、孔隙性薄膜孔隙度分布量測。

服務項目

  • 多晶薄膜材料結晶相分析(Phase analysis of Thin polycrystalline layers)
  • 晶格常數分析(Lattice constant analysis)
  • 晶粒度分析(grain size analysis)
  • 應力分析(Stress analysis)

規格

  • X-ray generator
    • Max. output power : 4KW
    • Max. high voltage: 60KV
    • Max. anode current: 1000mA
    • Stability (HV and anode current): < 0.01%
  • Vertical goniometer
    • decoupled theta / 2theta drive

 

 XRD
XRD

X光繞射儀(XRD)

應用於奈米材料的微結構分析,並具有多種功能:塊材、粉末、薄膜結晶相鑑定、磊晶膜品質、晶格匹配性鑑定、多層膜厚度、界面粗糙度量測、孔隙性薄膜孔隙度分布量測。

服務項目

  • 晶相鑑定分析(Phase identification analysis)
  • 晶格常數分析(Lattice constant analysis)
  • 晶粒度分析(grain size analysis)

規格

  • X-ray generator
    • Max. output power : 3.0 kW
    • Max. high voltage: 60 kV
    • Max. anode current: 60 mA
    • Stability (HV and anode current): < 0.01% per 10% mains fluctuation
    • Ripple: < 2% peak to peak
  • goniometer radius : between 130 and 240 mm


[{"text":"企業網","weight":13.0},{"text":"材化所","weight":11.5},{"text":"機械所","weight":10.0},{"text":"綠能所","weight":9.4},{"text":"生醫所","weight":8.0},{"text":"半導體","weight":6.2},{"text":"南分院","weight":5.0},{"text":"太陽能","weight":5.0},{"text":"課程","weight":5.0},{"text":"遠紅外線","weight":5.0},{"text":"雷射","weight":4.0},{"text":"LED","weight":4.0},{"text":"LED可見光","weight":3.0},{"text":"5G","weight":3.0},{"text":"工研人","weight":3.0},{"text":"電光所","weight":3.0},{"text":"綠能與環境研究所","weight":3.0},{"text":"機械","weight":3.0},{"text":"資通所","weight":2.0},{"text":"面板","weight":2.0},{"text":"文字轉語音","weight":2.0},{"text":"實習","weight":2.0},{"text":"無人機","weight":2.0},{"text":"生醫","weight":2.0},{"text":"3D","weight":2.0},{"text":"v2x","weight":2.0},{"text":"員工","weight":2.0},{"text":"地圖","weight":2.0},{"text":"太陽光電","weight":2.0},{"text":"材料與化工研究所","weight":1.0}]