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工業技術研究院

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探針顯微設備

服務說明

 掃瞄探針顯微鏡-SPM
掃瞄探針顯微鏡-SPM

掃瞄探針顯微鏡--SPM(AFM、STM、MFM)

可針對8吋晶圓以下的試片進行探針掃瞄顯微量測,依不同的探針使用可進行多種物理特性的量測。

服務項目

  • topography
  • dielectric properties
  • contact potential,electric dipole moment
  • magnetic domain
  • Dopant
  • conductivity
  • probe lithography

規格

  • scanning range:90μm × 90μm × 6μm
  • resolution:X axis and Y axis are 2 nm;Z axis is 0.05 nm;nonlearity < 1%
  • specimen size:200 mm (diameter) x 12 mm (thicjness)

應用

  • AFM Contact Mode, Tapping Mode, Non-contact Mode
  • Lateral Force Microscopy (LFM)
  • Visco-elastic AFM
  • Magnetic Force Microscopy (MFM)
  • Kelvin Force Microscopy(KFM or Scanning Surface Potential Microscopy,SSPM)
  • Conductive AFM
  • Scanning Capacitance Microscopy (SCM)
  • Nanolithography
 真空控溫型掃描探針顯微鏡
真空控溫型掃描探針顯微鏡

真空控溫型掃描探針顯微鏡--SPM(AFM、STM、MFM)

可改變試片的環境條件,真空至10^-6 torr,溫度範圍-120℃至400℃(加熱最高可至800℃)。僅限於2.5cm x 1 cm試片。依不同的探針使用可進行多種物理特性的量測。

服務項目

  • topography
  • dielectric properties
  • contact potential,electric dipole moment
  • magnetic domain
  • Dopant
  • conductivity
  • probe lithography

規格

  • scanning range:150μm × 150μm × 6μm
  • resolution:both of the X axis and Y axis are 1 nm;Z axis is 5 nm
  • specimen size:2.5 cm (diameter) x 1.0 cm (thickness)

應用

  • AFM Contact Mode, Tapping Mode, Non-contact Mode
  • Lateral Force Microscopy (LFM)
  • Visco-elastic AFM
  • Magnetic Force Microscopy (MFM)
  • Kelvin Force Microscopy (KFM or Scanning Surface Potential Microscopy,SSPM)
  • Conductive AFM
  • Scanning Capacitance Microscopy (SCM)
  • Nanolithography

定量力學及快速掃描探針顯微鏡-Q-SPM

本儀器是New generation AFM作用力<50 pN,接觸面積遠小於傳統AFM,不會刮傷樣品(適用於軟物質)、液態中可以穩定掃描、可整合光學系統(Raman,螢光…)、電極表面電位量測、奈米定量力學及電學特性量測、高速掃描功能。

服務項目

  • Topography
  • Nanomechanics
  • Imaging in liquid
  • Force mapping
  • Raman mapping

規格

  • scanning range:150 μm × 150 μm × 20 μm
  • image resolution: X and Y axis are 2 nm ; height noise :< 0.1 nm RMS (air), < 0.2 nm RMS (fluid)
  • force resolution:10 pN RMS for cantilever with k = 20 pN/nm
  • specimen size:1 × 3 inch slides, 25 mm coverslips, 35 and 60 mm plastic petri dishes

應用

  • AFM Contact Mode, Tapping Mode, Non-contact Mode, Peak Force Mode
  • Phase Imaging
  • PeakForce Quantitative Nanomechanical Property Mapping (QNM)
  • Force Volume
  • Nano-Indentation
  • Integrated AFM-Raman Imaging System(IRIS)
  • Microscope Image Registration and Overlay(MIRO)

定量力學及快速掃描探針顯微鏡-FS-SPM

本儀器是New generation AFM作用力<50 pN,接觸面積遠小於傳統AFM,不會刮傷樣品(適用於軟物質)、液態中可以穩定掃描、可整合光學系統(Raman,螢光…)、電極表面電位量測、奈米定量力學及電學特性量測、高速掃描功能。

服務項目

  • Topography
  • Nano-mechanics
  • Fastscan
  • Force mapping
  • surface potential
  • surface magnetic property
  • Nano-conductivity

規格

  • scanning range:90 μm × 90 μm × 10 μm
  • resolution: X axis and Y axis are 2 nm ; vertical noise: <40 pm RMS
  • speed: X-Y tip-velocity max.: > 2 mm/Sec.; Z tip-velocity max.: 12 mm/Sec
  • specimen size:210 mm(diameter) x 15 mm(thickness)

應用

  • AFM Contact Mode, Tapping Mode, Non-contact Mode, Peak Force Mode
  • Phase Imaging
  • PeakForce Quantitative Nanomechanical Property Mapping(QNM)
  • Force Volume
  • Nano-Indentation
  • Integrated AFM-Raman Imaging System(IRIS)
  • Microscope Image Registration and Overlay(MIRO)
 SNOM
SNOM

掃描式近場光學顯微鏡(SNOM)

本儀器是具有近場光學、共焦及原子力等三種功能合一的顯微鏡,可針對3.5英吋以下之試片進行近場光學影像檢測以及表面形貌量測。

服務項目

  • topography
  • dielectric properties
  • contact potential,electric dipole moment
  • magnetic domain
  • Dopant
  • conductivity
  • probe lithography

規格

  • 0.2 cps to 2x1012 cps:
  • Complete analysis from 0.1 fg.g-1 to 0.1% (LR, solution)
  • Minimum integration time:
  • Counting: 0.1 ms
  • Analog: 1 ms
  • Faraday: 1 ms
  • No decay time with Faraday detection system:
  • Specially designed integration circuit
  • Automatic switching between detection modes:
  • no preset
  • < 1 ms to Faraday detection


延伸閱讀
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