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工業技術研究院

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光電半導體製程實驗室

是一座小型量產的光電半導體實驗室,能提供三五族半導體(GaN)發光及功率元件、碳化矽(SiC)半導體功率元件,由上游磊晶到下游製程及封裝量測的整合性服務,具多元化RD功能,也是最佳貼近量產線的研發導量產平台。

反應式離子蝕刻設備
反應式離子蝕刻設備
6吋矽基板氮化鎵MOCVD
6吋矽基板氮化鎵MOCVD


延伸閱讀
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