工業技術研究院

技術簡介

尾氣處理設備智能化監測診斷技術致力於提升尾氣處理系統的透明化與智能化，通過通訊閘道器整合不同品牌設備的通訊協議，突破數據不兼容問題。技術結合全天候監測與健康模型算法，實現設備運行狀態的精準判別與異常預測，支持預測維護應用。該技術可廣泛應用於半導體、化工等需要高可靠性尾氣處理的行業，有效提升設備穩定性與運行效率。

Abstract

The intelligent monitoring and diagnostic technology for exhaust treatment equipment aims to enhance the transparency and intelligence of exhaust treatment systems. By integrating communication protocols from different brands through a gateway, it overcomes data incompatibility issues. Combining round-the-clock monitoring with health model algorithms, the technology enables precise assessment of equipment operating conditions and anomaly prediction, supporting predictive maintenance applications. This technology is widely applicable in industries such as semiconductors and chemicals that require high-reliability exhaust treatment, significantly improving equipment stability and operational efficiency.

技術規格

尾氣處理設備智能化監測診斷模組 尾氣處理系統健康判別模型，涵蓋turbo Pump、Dry pump以及scrubber至少3種設備

Technical Specification

Intelligent Monitoring and Diagnostic Module for Exhaust Treatment Equipment Health Assessment Model for Exhaust Treatment Systems, covering at least three types of equipment: turbo pump, dry pump, and scrubber

技術特色

國內半導體尾氣處理設備多使用國外大廠，各家廠牌間使用之通訊協定不盡相同，導致數據統一性具有一定難度。尾氣處理設備智能化監測診斷技術突破品牌與設備間通訊限制，透過Gateway整合通訊，實現設備資訊透明化與全天候監測，運用健康模型進行狀態判別，支持預測維護應用，提高尾氣處理設備的穩定性與運行效率。

應用範圍

精密機械產業、自動化控制產業、半導體製程產業

接受技術者具備基礎建議（設備）

IPC控制器與通訊Gateway、智能化尾氣處理系統、健康診斷函式庫

接受技術者具備基礎建議（專業）

需具備有電控與機械經驗之開發人員

聯絡資訊