工業技術研究院

技術簡介

隨著電動車、能源及工業領域發展，碳化矽基板的需求逐年增長，然而，在基板製造過程中有不少高純度碳化矽粉體被當作廢棄物處理，造成生產成本提高與環境負擔。 此技術從切削廢液中分離出碳化矽粉體，透過多段純化製程，搭配不同種類酸洗液以及熱純化條件，去除包含切削油、金屬、氧化物等雜質，成功回收出純度99.9995％之碳化矽粉體，同時此技術具備可客製粒徑、填充密度等優勢。

Abstract

As the electric vehicle, energy, and industrial sectors expand, the demand for silicon carbide substrates continues to rise annually. However, a significant portion of high-purity silicon carbide powder is discarded as waste during manufacturing, leading to higher production costs and environmental burdens. This technology successfully recovered silicon carbide powder from cutting waste fluids by employing multi-stage purification processes. The methods integrate various acid-washing solutions and thermal purification conditions to remove impurities such as cutting oils, metals, and oxides. The outcome is silicon carbide powder with an impressive purity of 99.9995％. Additionally, this technology provides flexibility in tailoring particle size and packing density to meet diverse requirements.

技術規格

1. 粉體純度 ＞ 99.999 ％。 2. 晶型: 4H。 3. 填充密度 ＞ 1 g/cm3。

Technical Specification

1. Powder purity ＞ 99.999 ％. 2. Polytype: 4H. 3. Packing density ＞ 1 g/cm3.

技術特色

1. 包含整套分離、純化製程設計、實驗及分析結果。 2. 包含SiC粉體規格化製程說明，可針對粒徑、填充密度進行客製。 3. 此技術為從切削廢液中提取高價值SiC。

應用範圍

SiC基板產業。

接受技術者具備基礎建議（設備）

具備化學清洗槽。

接受技術者具備基礎建議（專業）

具備基礎化學知識。

聯絡資訊