『您的瀏覽器不支援JavaScript功能,若網頁功能無法正常使用時,請開啟瀏覽器JavaScript狀態』

跳到主要內容區塊

工業技術研究院

:::

技術名稱: 酸性氣體潔淨劑製造技術

技術簡介

本技術的一主要目的在提供一種具高吸附容量的處理酸性氣體(氯化氫, 三氟化硼,氯氣)之乾式潔淨劑,主要應用於半導體或光電廠之尾氣處理。 由本技術所製造之潔淨劑,對於三氟化硼的處理效率可達 99%以上,吸附容量達100L gas/kg 以上 。

Abstract

A cleaning agent for treating harmful gas is disclosed. The cleaning agent has a specific surface of at least 60 m2/g and is produced by co-precipitation method. The cleaning agent of the present invention can remove acid exhaust gases (e.g., hydrogen chloride, boron tri-fluoride, boron tri-chloride, chlorine) emitted from semiconductor and opto-electronic manufacturing processes by chemisorption.

技術規格

操作溫度 : 常溫 處理流量 : < 200 L/min 對於BF3, HCl處理效率 : > 99%

Technical Specification

Operate temp. : >10 C Volumetric flow-rate : < 200 L/min Removal efficiency for treating : BF3, HCl > 99%

技術特色

不需要添加貴金屬(AgO)或高污染性重金屬(HgO、CdO)等促進劑, 製造成本低,環境友善性高

應用範圍

半導體製造業、光電產業之製程尾氣處理

接受技術者具備基礎建議(設備)

接受技術者具備基礎建議(專業)

具有高科技業尾氣處理基本常識者

技術分類 綠色製程與產品

聯絡資訊

聯絡人:許榮男 環境與安全技術組(N)

電話:+886-3-5915033 或 Email:JNHsu@itri.org.tw

客服專線:+886-800-45-8899

傳真:+886-3-5820378

[{"text":"企業網","weight":13.0},{"text":"材化所","weight":11.5},{"text":"機械所","weight":10.0},{"text":"綠能所","weight":9.4},{"text":"生醫所","weight":8.0},{"text":"半導體","weight":6.2},{"text":"南分院","weight":5.0},{"text":"太陽能","weight":5.0},{"text":"課程","weight":5.0},{"text":"遠紅外線","weight":5.0},{"text":"雷射","weight":4.0},{"text":"LED","weight":4.0},{"text":"LED可見光","weight":3.0},{"text":"5G","weight":3.0},{"text":"工研人","weight":3.0},{"text":"電光所","weight":3.0},{"text":"綠能與環境研究所","weight":3.0},{"text":"機械","weight":3.0},{"text":"資通所","weight":2.0},{"text":"面板","weight":2.0},{"text":"文字轉語音","weight":2.0},{"text":"實習","weight":2.0},{"text":"無人機","weight":2.0},{"text":"生醫","weight":2.0},{"text":"3D","weight":2.0},{"text":"v2x","weight":2.0},{"text":"員工","weight":2.0},{"text":"地圖","weight":2.0},{"text":"太陽光電","weight":2.0},{"text":"材料與化工研究所","weight":1.0}]