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工業技術研究院

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技術名稱: 光電元件用感光樹脂技術與應用

技術簡介

以 GMA 改質過的 J-690 樹脂( Johnson )、-Terpineol ( 固含量=40% )、光起始劑(Iegacure 907)、玻璃粉、壓克力反應性單體(SR-399、DPHA)及添加劑(BYK-141、BYK-163)混合均勻後,以三滾輪研磨成感光性玻璃漿料。旋轉塗佈漿料於玻璃基材上,控制轉速及時間可得膜厚?75m,烘烤條件為80℃/45 分鐘,以散射曝光機曝光(曝光能量250?500 mJ/cm2),以 1 wt% Na2CO3(aq)(噴壓1.4 kg/cm2)顯影,解析度約 50 m(line/space=1/4),燒結溫度550 ℃,燒結後厚度=45?50 m。

Abstract

The components of photosensitive glass paste include resin solution, photoinitiator(Irgacure 907), glass frit, acrylate reactive monomers(SR-399 and DPHA) and additives(BYK-141 and BYK-163). The resin solution was compose of J690-GMA modified polymer and ?-terpineol, solid content was about 40 wt%.The glass paste can form a thick film on glass substrate by a spinner, control spin speed and time can obtain a film about 75 ?m thick. After coating, the thick film was dried(soft baking) at 80 oC for 45 minutes.The coating film was irradiated with ultraviolet ray by a high pressure mercury lamp through a negative mask of 200 ?m pitch. The exposure value was 250 to 500 mJ/cm2. Then 1 wt% sodium bicarbonate aqueous solution was showered for development, and the pressure of shower spray was 1.4 kg/cm2. The resolution of coating film was 50 ?m/200 ?m(line/spacce), and the barrier ribs were formed after fired at about 550 oC, the heigh was about 45 to 50 ?m.

技術規格

以旋轉塗佈玻璃光阻劑,可得約75 m之厚度,解析度為50 m(Line/Space=1/4),燒結後之厚度為?40 m

Technical Specification

spin coatingthickness = 75 ?m, resolution = 50 ?m (line/space=1/4)thickness after firing= 40 ?m

技術特色

玻璃漿料解析度50 mm(line╱space=1 ╱ 4),膜厚?75 mm。

應用範圍

場發射平面顯示器(FED)之介電層

接受技術者具備基礎建議(設備)

旋轉塗佈機、烘箱、曝光機、顯影機

接受技術者具備基礎建議(專業)

1. 熟稔有機合成,能製備所需單體及樹脂 2. 了解光阻劑原理,可進行配方設計與調整 3. 熟悉操作三滾輪,以便進行漿料研磨

技術分類 特用化學品

聯絡資訊

聯絡人:陳秀美 光電及電子化學材料產品研究組

電話:+886-3-5913357 或 Email:HSIUMEICHEN@itri.org.tw

客服專線:+886-800-45-8899

傳真:+886-3-5827694

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