工業技術研究院

技術簡介

本自動監測儀自動監測原理為將多點污染源之樣品以抽氣泵經樣品傳輸管彙集後，再利用源流選擇器及自動注射器依序切入GC\FID (氣相層析儀\離子化偵測器)，其中自動注射器之設計可達成同時自動監測THC (總碳氫化合物) 及各別VOC (揮發性有機物)濃度之功能。本系統之具體效益有二： 1. 具單機掃描多點之功能，大幅降低監測成本。 2. 可同時監測THC及多種有機物兼具法規要求及製程評估之功能，一機多用。

Abstract

A new method for on-line monitoring of total hydrocarbons and non-methane hydrocarbons in stack gas simultaneously was developed. Based on the principle of on-line GC/FID, the method was developed and can be considered as a new modification of the Method 25 and 25A of U.S. EPA. Major advantages of the method included 1) capability of distinguishing methane as Method 25; 2) near-real-time results; 3) broad species coverage; 4) monitoring methane in straightforward manner; 5) low operation and maintenance costs. In the proposed method, test samples were continuously pumped from detection sources and loaded with a two-loop sampling valve. The samples were then injected into two GC columns-empty and DB-624 columns. The empty column was used for detection of THC, and the molecular sieve column was for VOCs. The detector in this GC was FID. The tests were carried out to measure the THC and VOCs in waste gas in various industries, including surface coating, semiconductor manufacturing, synthetic leather industries. The results showed the promising and reliable measurement of the test method for THC and VOCs in waste gas.

技術規格

(1) Test Method for On-line Continuous Measurement of Total Hydrocarbons (THC) and Non-methane Hydrocarbons (NMHC) in Stack Gas (2) 排放管道中總碳氫化合物(THC)及非甲烷總碳氫化合物(NM-THC)含量自動檢測方法開發與應用 (3) 半導體業揮發性有機物濃度監測設備設置案例研究 (4) 以 GC/FID 進行有機廢氣自動監測 THC 及各別污染物 (5) 非甲烷有機

Technical Specification

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技術特色

一種有機廢氣自動監測方法，將該有機廢氣引入一多向閥，再以可選擇的方式送至空管及分離管柱，送至該空管之有機廢氣以一偵測器測得總碳氫含量濃度，而送至該分離管柱之有機廢氣經分離後以該偵測器測得個別揮發性有機物之濃度。 技術資料包含： 1. 有機廢氣自動監測設備操作維護手冊 2. 自動監測設備維護手冊

應用範圍

(1) 固定污染源有機廢氣排放特性調查 提供申報制度實施之基本資料 提供污染調查計畫之基本資料 提供空氣污染防制設備設計之基本資料 (2) 監測排放口THC及個別VOCs濃度 監測及評估空氣污染防制設備運轉效率 驗收空氣污染防制設備工程 協助空氣污染防制設備工程啟動試車 調整製程或空氣污染防制設備的操作條件 (3) 有機污染物濃度監視 作業環境空氣品質監視 生產製程穩定性監視 固定污染源排放空氣品質監視與自動監測系統架設 在國內實地檢測的行業有電子半導體業、製罐業、精密陶瓷業

接受技術者具備基礎建議（設備）

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接受技術者具備基礎建議（專業）

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聯絡資訊