『您的瀏覽器不支援JavaScript功能,若網頁功能無法正常使用時,請開啟瀏覽器JavaScript狀態』

跳到主要內容區塊

工業技術研究院

:::

技術名稱: MRAM 元件製程技術

技術簡介

磁電阻式隨機存取記憶體(Magnetoresistive Random Access Memory)是擁有高讀寫速度、高集積度、高耐久性、低耗電及抗輻射等多項優點之非揮發記憶體,本所採用磁性穿隧接面(Magnetic Tunneling Junction)元件作為MRAM記憶體之核心,所呈現獨特的磁阻特性,具有與傳統CMOS製程與週邊電路最高的相容性,是未來繼Flash、SRAM、DRAM之後脫穎而出之終極記憶體(Ultimate Memory)。

Abstract

Because of its non-volatility, non-destructive reading, fast access speed, high integration, high reliability, low power consumption & strong radiation resistance, MRAM is a major emerging memory device. Through magnetic tunneling junction property, MRAM can perform its unique magnetoresistivity by using traditional CMOS process.

技術規格

本技術包括磁性非揮發記憶體相關技術之研發,可使用於系統記憶體,具高密度(可達6-8F2)、高速度 (both read and write<50ns)、高可重複讀寫次數(>1015) 、省電(operation current<10mA、standby current<1A) 及非揮發特性。

Technical Specification

Magnetic growth layer thickness< 20nm Roughness/area < 2nm/cm2 Tunneling barrier thickness < 2nm MR ratio>45%

技術特色

MRAM 後段關鍵模組製程以及MRAM元件製程整合。關鍵製程:Via金屬連接層蝕刻製程模組以及上電極蝕刻製程模組。

應用範圍

傳統Flash、SRAM、DRAM所應用的範圍,如Desktop PC、Laptop PC、PDA、手機、隨身碟、數位相機、讀卡機等等。

接受技術者具備基礎建議(設備)

具記憶體元件開發能力之半導體廠

接受技術者具備基礎建議(專業)

CMOS製程技術記憶體相關元件之設計、製造能力。

技術分類 製程

聯絡資訊

聯絡人:鍾佩翰 企畫與推廣組

電話:+886-3-5912777 或 Email:stephen.chung@itri.org.tw

客服專線:+886-800-45-8899

傳真:+886-3-5917690

[{"text":"企業網","weight":13.0},{"text":"材化所","weight":11.5},{"text":"機械所","weight":10.0},{"text":"綠能所","weight":9.4},{"text":"生醫所","weight":8.0},{"text":"半導體","weight":6.2},{"text":"南分院","weight":5.0},{"text":"太陽能","weight":5.0},{"text":"課程","weight":5.0},{"text":"遠紅外線","weight":5.0},{"text":"雷射","weight":4.0},{"text":"LED","weight":4.0},{"text":"LED可見光","weight":3.0},{"text":"5G","weight":3.0},{"text":"工研人","weight":3.0},{"text":"電光所","weight":3.0},{"text":"綠能與環境研究所","weight":3.0},{"text":"機械","weight":3.0},{"text":"資通所","weight":2.0},{"text":"面板","weight":2.0},{"text":"文字轉語音","weight":2.0},{"text":"實習","weight":2.0},{"text":"無人機","weight":2.0},{"text":"生醫","weight":2.0},{"text":"3D","weight":2.0},{"text":"v2x","weight":2.0},{"text":"員工","weight":2.0},{"text":"地圖","weight":2.0},{"text":"太陽光電","weight":2.0},{"text":"材料與化工研究所","weight":1.0}]