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工業技術研究院

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技術名稱: 晶圓表面有機污染檢測技術

技術簡介

藉由製備特定濃度之有機污染物,使吸附於晶圓表面,建立有機污染物之檢量線與檢測技術

Abstract

none

技術規格

完成Trinton-X-100 1 ppm及50 ppm的檢量線

Technical Specification

none

技術特色

當積體電路進入奈米之領域時,所衍生的新的有機污染問題就更加明顯與重要,除了要改良舊式同時亦要發展新式清洗方式,而利用晶圓表面有機污染檢測技術則可以用來檢測清洗的效率。

應用範圍

半導體製造業,TFT-LCD等平面顯示器產業,生物晶片製造業等高科技周邊設備製造業等。

接受技術者具備基礎建議(設備)

需具備無塵室環境,並設有抽器與廢氣排放管線設備與超純水供應等。

接受技術者具備基礎建議(專業)

需具備無塵室操作經驗,以及具有微污染概念者。

技術分類 資源資訊

聯絡資訊

聯絡人:徐靜怡 水利產業技術組

電話:+886-3-5917703 或 Email:hhtr@itri.org.tw

客服專線:+886-800-45-8899

傳真:+886-3-5835338

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