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工業技術研究院

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技術名稱: 鋁合金加熱板與靶材鑄造技術

技術簡介

在鋁合金中添加微量的過渡或高溫金屬例如:矽、鈦、鉻、鈷、錳、鐵等,傳統的鑄造方法常常造成組織偏析、析出物粗大化及氣孔與夾渣物等缺陷,本技術藉由金屬冶金原理以達到同時鋁晶粒組織微細化與析出微細的金屬化合物之雙重功效,同時利用特殊鑄造方法,快速成形高品質的靶材或加熱板(heat plate)鑄造件。本技術還可包含鑄包加熱元件,並產生良好的接合界面。

Abstract

Aluminum alloys fabricated by traditional casting routes usually have the disadvantages of segregations and coarse precipitates, especially when these alloys are added with transition metals such as Si, Ti, Cr, Mn, Fe, etc. This technique provides a method for quickly shaping the aluminum targets and heat plates that have fine microstructures and precipitates. In addition, the heat plate fabricated has a good interface bonding between heating elements and aluminum matrix.

技術規格

鑄件組織微細化及低氣孔與低雜質等缺陷。

Technical Specification

Aluminum alloy target or heat plate with fine microstructures and little gas porosity and impurity

技術特色

none

應用範圍

1.濺鍍薄膜用的鋁合金靶材 2.加熱矽晶圓用且用於真空封裝不會漏氣的鋁合金加熱板

接受技術者具備基礎建議(設備)

鋁合金熔解與精煉設備,成份分析與金相等檢驗設備

接受技術者具備基礎建議(專業)

none

技術分類 金屬材料

聯絡資訊

聯絡人:陳俊沐 金屬材料研究組

電話:+886-3-5916987 或 Email:mu@itri.org.tw

客服專線:+886-800-45-8899

傳真:+886-3-5820207

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