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工業技術研究院

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技術名稱: 微波電漿碳奈米管合成設備開發

技術簡介

一種利用微波產生電漿、解離氣體來合成CNTs的設備開發,主要技術內容為1.微波電漿共振腔體的設計及建立電磁場形模擬技術;2.微波電漿合成系統製作;3.電子迴旋共振腔(ELR)及負偏壓系統設計製作。

Abstract

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技術規格

2.45GHz 2kw微波電漿CVD。

Technical Specification

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技術特色

1.國內廠商目前無此技術。 2.國外廠商ASTeX有生產但價格昂貴。

應用範圍

適用於鑽石薄膜、類鑽石薄膜及奈米碳管成長製程研發。

接受技術者具備基礎建議(設備)

具有表面薄膜沉積處理設備製作經驗之廠商。

接受技術者具備基礎建議(專業)

基礎化學及微波工程具有基本知識之廠商。

技術分類 01 綠能環境

聯絡資訊

聯絡人:黃廷位 新能源應用技術組

電話:+886-3-5914299 或 Email:twhuang@itri.org.tw

客服專線:+886-800-45-8899

傳真:+886-3-5820230

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