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工業技術研究院

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技術名稱: 相變化記憶體元件與製程技術

技術簡介

相變化記憶體(Ovonic Unified Memory, OUM)具有非揮發性、高讀取訊號、高密度、高寫擦速度與次數以及低工作電流/功率的特質,是相當有潛力的非揮發性記憶體。本所的相變化記憶體元件製程技術,除了開發記憶胞的關鍵製程模組外,更具有與傳統CMOS製程之良好相容性。

Abstract

Because of its non-volatility, large sensing signal, high density, high endurance, fast access speed, and low current/power consumption, OUM has the potentiality to improve the performance compared to other non-volatile memory. We provide the technology which develop the key process module of OUM cell and good integration with traditional CMOS process.

技術規格

提升相變化薄膜與電極之間的附著力達到 40Mpa、設計縮減記憶胞之電極接觸面積小於 8750nm2。

Technical Specification

The adhesive strength between phase-change and electrode layers is expected to achieve 40 MPa. The contact area between phase-change and electrode layers is limited to 8750 nm2.

技術特色

OUM 元件關鍵模組製程(薄膜、蝕刻)以及OUM元件製程整合。關鍵製程:相變化疊層薄膜與蝕刻製程模組、記憶胞之電極接觸面積微縮。

應用範圍

傳統Flash、SRAM、DRAM所應用的範圍,如Desktop PC、Laptop PC、PDA、手機、隨身碟、數位相機、讀卡機等等。

接受技術者具備基礎建議(設備)

具記憶體元件開發能力之半導體廠

接受技術者具備基礎建議(專業)

CMOS製程技術記憶體相關元件之設計、製造能力。

技術分類 製程

聯絡資訊

聯絡人:鍾佩翰 奈米電子技術組

電話:+886-3-5912777 或 Email:stephen.chung@itri.org.tw

客服專線:+886-800-45-8899

傳真:+886-3-5917690

[{"text":"企業網","weight":13.0},{"text":"材化所","weight":11.5},{"text":"機械所","weight":10.0},{"text":"綠能所","weight":9.4},{"text":"生醫所","weight":8.0},{"text":"半導體","weight":6.2},{"text":"南分院","weight":5.0},{"text":"太陽能","weight":5.0},{"text":"課程","weight":5.0},{"text":"遠紅外線","weight":5.0},{"text":"雷射","weight":4.0},{"text":"LED","weight":4.0},{"text":"LED可見光","weight":3.0},{"text":"5G","weight":3.0},{"text":"工研人","weight":3.0},{"text":"電光所","weight":3.0},{"text":"綠能與環境研究所","weight":3.0},{"text":"機械","weight":3.0},{"text":"資通所","weight":2.0},{"text":"面板","weight":2.0},{"text":"文字轉語音","weight":2.0},{"text":"實習","weight":2.0},{"text":"無人機","weight":2.0},{"text":"生醫","weight":2.0},{"text":"3D","weight":2.0},{"text":"v2x","weight":2.0},{"text":"員工","weight":2.0},{"text":"地圖","weight":2.0},{"text":"太陽光電","weight":2.0},{"text":"材料與化工研究所","weight":1.0}]