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工業技術研究院

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技術名稱: 平面顯示器陣列圖案瑕疵檢測系統整合應用技術

技術簡介

在TFT-LCD製造過程中,基板或面板製造廠使用自動光學檢查設備(AOI)來確保生產的產品品質。本技術主要是利用高速多個CCD攝影機同步取像控制技術、平行高速影像處理控制架構與快速瑕疵檢測之影像處理及判別法則以達到現今AOI高速、高精度的需求。

Abstract

In TFT-LCD process, manufacturers use AOI (automatic optical inspection) equipments to ensure high quality of products. This technology mainly consists of high-speed multi-CCD cameras images grabbing, high-speed processing architecture, and dedicated defect inpection algorithm to meet the demands for high-speed and high accuracy of AOI equipments nowadays.

技術規格

1.檢測物: TFT-LCD陣列圖案、彩色濾光片、素玻璃 2.檢測速率: 80 M pixel/sec 3.最小瑕疵: 5μm

Technical Specification

1. Inspected object: TFT-LCD array pattern, color filter. 2. Inspection speed:80M pixel/sec. 3. Min. defect size: 5μm.

技術特色

1.高速多個CCD攝影機同步取像控制技術 2.平行高速影像處理控制架構 3.自動瑕疵分類 4.快速瑕疵檢測法則

應用範圍

TFT-LCD基板(陣列圖案、彩色濾光片、素玻璃)

接受技術者具備基礎建議(設備)

1.取像平台 2.視覺元件 3.示波器

接受技術者具備基礎建議(專業)

1.具電機、光學視覺及機構設計基礎 2.系統整合測試

技術分類 LCD設備業

聯絡資訊

聯絡人:張俊隆 智慧系統工程技術組

電話:+886-3-5915847 或 Email:VincentChang@itri.org.tw

客服專線:+886-800-45-8899

傳真:+886-3-5820451

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