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工業技術研究院

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技術名稱: 奈米顆粒表面電位分析及控制技術

技術簡介

要去除半導體研磨廢水中的奈米顆粒,首要為破壞奈米顆粒的穩定度,由於奈米顆粒由於顆粒極小,當表面帶有同性電荷時,顆粒會相互排斥而均勻分散於水體中,奈米顆粒帶電量的多寡,與水體中的pH值、離子數、奈米顆粒種類等因素有關,奈米顆粒表面電位越高,不論帶有正電或是負電性,均有使其避免凝聚及維持穩定分散的效果,穩定度越高,奈米顆粒越不容易自水中移除,因此本技術針對奈米顆粒表面電位控制使其相互靠近,再經物理方式移除。

Abstract

none

技術規格

藉由本技術能將顆粒表面電位控制在±1.8mV以內

Technical Specification

none

技術特色

減低奈米顆粒的表面電位有助於奈米顆粒間的相互靠近,而藉由凡得瓦爾力凝聚成較大顆粒,進而可藉由沉澱、浮除或過濾等物理方式加以去除。

應用範圍

化學機械研磨廢水處理、封裝製程晶背研磨廢水處理、玻璃基板研磨廢水處理

接受技術者具備基礎建議(設備)

水回收設備、水質分析設備

接受技術者具備基礎建議(專業)

具半導體製程、廢水處理及水質檢測之基礎觀念與能力

技術分類 微污染分析技術

聯絡資訊

聯絡人:黃盟舜 水科技與環境分析技術組

電話:03-5913154 或 Email:mshuang@itri.org.tw

客服專線:+886-800-45-8899

傳真:03-5835338

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