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工業技術研究院

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技術名稱: 奈米顆粒廢水回收系統設計開發

技術簡介

利用電混凝/高級氧化複合技術處理化學機械研磨廢液,先將過氧化氫添加到研磨廢液中,再導入由鐵電極板所產生的電場,可以同時去除廢液中的懸浮固體及有機混合物,先將廢液中的顆粒尺寸變大,然後將奈米顆粒加以移除。

Abstract

A method for the treatment of CMP wastewater that utilizes the principles of electrocoagulation and advanced oxidation processes reactions has been investigated. The method consists in subjecting the wastewater to an applied electric field between two iron electrodes in the presence of hydrogen peroxide to simultaneously remove suspended solids and organic compounds. Became larger particle through van der waals interaction energy, then to removed the nanopartilces from wastwater.

技術規格

經本技術將CMP廢水中TDS<800 mg/L,濁度<4NTU,降至自來水標準

Technical Specification

After treatment, the TDS to below 800 mg/L, the turbidity to below 4 NTU

技術特色

可藉由氧化反應的進行以去除水中的有機物質,同時提高後續電混凝反應去除水中奈米顆粒之效率,可解決因有機成分與顆粒表面鍵結所形成之顆粒穩定,進而提升電混凝之處理效果、縮短處理時間與成本,可同時去除總有機碳、溶解矽及濁度,使回收水能回收至製程使用。

應用範圍

化學機械研磨廢水處理、封裝製程晶背研磨廢水處理、玻璃基板研磨廢水處理

接受技術者具備基礎建議(設備)

水回收設備、水質分析設備

接受技術者具備基礎建議(專業)

具半導體製程、廢水處理及水質檢測之基礎觀念與能力

技術分類 微污染分析技術

聯絡資訊

聯絡人:黃盟舜 水科技與環境分析技術組

電話:+886-3-5913154 或 Email:mshuang@itri.org.tw

客服專線:+886-800-45-8899

傳真:+886-3-5820017

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