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工業技術研究院

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技術名稱: 連續式高流量奈米溶膠過濾模組開發

技術簡介

連續式高流量奈米溶膠過濾模組技術特點在於先氧化再進行混凝處理,由釋放出的鐵離子進行電混凝,與廢液中的奈米顆粒形成膠羽沉降,而過氧化氫則進行氧化處理,破壞廢液中有機成分形成二氧化碳與水,處理量為6噸/天。

Abstract

The module of continuous and high flow rate nanoparticles filtration is to explore the use of advanced oxidation processes reactions in conjunction with electrocoagulation reactions. Dissolved iron is responsible for electrocoagulation while the hydroxyl radicals produced through the reaction of dissolved iron species with hydrogen peroxide destroy dissolved organics. Then to produced the carbon dioxide and waters. The flowing rate of electrocoagulation / advanced oxidation processes was 6 CMD.

技術規格

本技術針對CMP廢水的處理流量可達6噸/天,且水質可達回收標準。

Technical Specification

The flowing rate of electrocoagulation / advanced oxidation processes was 6 CMD.

技術特色

連續六小時處理化學機械研磨廢液後仍具有顯著混凝沉降效果,電極板不需停機進行再生處理,具有實質上的處理效益,除了對奈米顆粒的去除效率高之外,並同時具有去除總有機碳、溶解態二氧化矽的能力,最重要的是反應後污泥較化學混凝污泥容易脫水,且佔地需求小。

應用範圍

化學機械研磨廢水處理、封裝製程晶背研磨廢水處理、玻璃基板研磨廢水處理

接受技術者具備基礎建議(設備)

水回收設備、水質分析設備

接受技術者具備基礎建議(專業)

具半導體製程、廢水處理及水質檢測之基礎觀念與能力

技術分類 微污染分析技術

聯絡資訊

聯絡人:黃盟舜 水科技與環境分析技術組

電話:+886-3-5913154 或 Email:mshuang@itri.org.tw

客服專線:+886-800-45-8899

傳真:+886-3-5820017

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