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工業技術研究院

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技術名稱: 最適化奈米用水製造系統技術

技術簡介

為符合未來世代超純水水質潔淨度之需求,本年度計畫主要宗旨乃為有效去除超純水之微量離子、微量有機物及微細顆粒,因此,本技術建置了兩套超純水系統,分別為奈米製程用水系統及多元化轉用測試平台。本計畫執行實驗過程中,獲致結果及績效臚列如下: (1) 系統用水端(Point of Use, POU)產水水質可達TOC≦0.4 ppb,Silica ≦0.2 ppb,粒徑≧0.05 μm,顆粒數≦0.5 counts/ml,bacteria<1 cfu/ml,ion<10 ppt之標準。 (2) 完成兩套超純水系統,分別為奈米製程用水系統及多元化轉用測試平台。 (3) 完成微量離子、微量有機物及微細顆粒去除技術及最適化操作參數。 (4) 完成多項專利,包含超純水微量有機物質之去除方法、降低超純水中微量有機物之方法及其系統等多國專利。 (5) 與多家業者進行合作,達到環構計畫之主要宗旨及目的,合作廠商包含:緯世科技、力晶、寶晶、台積電、旺宏、雲林水利會、亞智、奇美、聯純等。 (6) 本計畫衍生加值項目,包含有:水系統諮詢及優化設計計畫書、多元化水源轉用pilot測試、提供水質分析與trouble shooting服務、支援關鍵/前瞻計畫/業界科專。

Abstract

In order to promote the water quality in the high-tech industries, the innovative technologies for removal trance organics, ions and particles in ultra-pure water must be develop and study. furthermore ultrapure water quality is an important key to conform the technologic development in next generation. Hence, This paper presents the results of our technology applying in ultrapure water. And our performances are as follows: 1. The water qualities of point of use can be treated to conform the 65nm standards:TOC≦0.4 ppb,Silica ≦0.2 ppb,particle size≧0.05 μm,particle numbers ≦0.5 counts/ml,bacteria<1 cfu/ml,ion<10 ppt。for 65nm in IC process. 2. Two ultrapure water systems were established, Including the nano-water system and multi- purpose test and verify water system. 3. Our plan completed the study of trance organics, ions and particles removal technologies .also obtained the optimization operating factors in water systems. 4. Our plan applied for a lot of patents. Include the method of removal trance organic in ultra-pure water. 5. Our plan was co-operate with some industries, like tsmc, PSC, CMO, MXIC, INTECH, etc.. Our plan can provide the total solution services, include the consultant service, water system design, water analysis service, trouble shooting of water system, and support some demand of other plans.

技術規格

產水水質規格為TOC≦0.4 ppb,Silica ≦0.2 ppb,particle size≧0.05 μm,particle numbers ≦0.5 counts/ml,bacteria<1 cfu/ml,ion<10 ppt。

Technical Specification

The ultra-pure water qualities are as fallows: TOC≦0.4 ppb,Silica ≦0.2 ppb,particle size≧0.05 μm,particle numbers ≦0.5 counts/ml,bacteria<1 cfu/ml,ion<10 ppt。

技術特色

本技術之產出,可使系統用水端(Point of Use, POU)產水水質可達TOC≦0.4 ppb,Silica ≦0.2 ppb,粒徑≧0.05 μm,顆粒數≦0.5 counts/ml,bacteria<1 cfu/ml,ion<10 ppt之標準。此外,本技術除了作為為奈米製程用水製備技術外,亦可應用於多元化水源轉用之用,提高水資源可利用性。 本技術並已完成微量離子、微量有機物及微細顆粒去除技術及最適化操作參數。且完成多項專利,包含超純水微量有機物質之去除方法、降低超純水中微量有機物之方法及其系統等多國專利。

應用範圍

超純水製造系統水質及流程改善、系統優化等。

接受技術者具備基礎建議(設備)

水質分析儀器、超純水製造系統等。

接受技術者具備基礎建議(專業)

具超純水操作、施工及設計之基礎觀念與能力為佳

技術分類 工程與自動化研究

聯絡資訊

聯絡人:陳建宏 水科技與環境分析技術組

電話:+886-3-5732033 或 Email:7chchen@itri.org.tw

客服專線:+886-800-45-8899

傳真:+886-3-5820017

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