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工業技術研究院

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技術名稱: 無塵室氣流場模擬分析

技術簡介

氣體洩漏在半導體廠或面板場是一重大工安事件。因其氣體含有有毒性或可燃性氣體。輕者造成虛驚一場,重者造成人員死亡或場區發生火災。如何預先偵測到氣體洩漏及其擴散的方向實為一重要的議題。本研究利用數值模擬進行無塵室內部空間流場模擬,探討不同洩漏氣體如PH3, NH3, NF3, SiH4, CH4, CL2及SF6及不同洩漏位置。以提供廠務人員氣體洩漏時相關資訊,使其能預先安置正確氣體洩漏偵測點。從案例分析結果顯示,數值模擬之氣流方向和實驗量測趨勢一致。

Abstract

To prevent such damage, a pre-detective and preventive methodology of gases leaking becomes the most important issue in factory safety consideration. In this report, a simulation research using PH3, BH3, NF3, SiH4, CH4, CL2 and SF6 as gases to verify the leaking flow distribution inside a clean room is discussed. Some suggestions are given in the research to provide the people where the detective sensors should be placed in the enclose room in order to sense the leaking at the very beginning. 

技術規格

數值模擬

Technical Specification

CFD

技術特色

利用電腦模擬預測無塵室氣體洩漏流動方向,以提供廠區廠務人員預先進行監測點佈置。

應用範圍

無塵室

接受技術者具備基礎建議(設備)

none

接受技術者具備基礎建議(專業)

none

技術分類 02 D建築節能研究

聯絡資訊

聯絡人:翁淩家 智慧節能系統技術組

電話:03-5914996 或 Email:lcweng@itri.org.tw

客服專線:+886-800-45-8899

傳真:none

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