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工業技術研究院

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技術名稱: 液體濃縮回收系統

技術簡介

目前光阻濃縮回收設備無法精密掌控濃縮作業之時間及效果,因而會影響到光阻劑回收再生之處理時間及調配成本,因此重新針對此缺失作更新。

Abstract

It is not accurate controlled the working time and effect in the current concentration apparatus, and influenced the recycled time and cost of regeneration photoresist. Hence, we re-design to the new equipment for update defects.

技術規格

none

Technical Specification

none

技術特色

一、可連續進行濃縮作業,不需停機更換被濃縮物。 二、被濃縮物不需與外界環境接觸,避免增加被濃縮物之被污染機會。 三、對於被濃縮物之濃縮效率可精確掌握。

應用範圍

光電半導體微縮影製程所使用之高價化學品光阻回收再利用濃縮作業。

接受技術者具備基礎建議(設備)

對於機械構造及設備運作原理需有基本維修及操作技能。

接受技術者具備基礎建議(專業)

對於被濃縮物之物理及化學特性需瞭解,且曾接受有機溶劑作業人員之訓練

技術分類 02 N空氣污染防治

聯絡資訊

聯絡人:楊炎勝 空污防制與安全技術組

電話:+886-3-5919073 或 Email:victor_yang@itri.org.tw

客服專線:+886-800-45-8899

傳真:+886-3-5820270

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