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工業技術研究院

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技術名稱: 彩色濾光片中黑色光阻與紅色光阻之回收再利用技術

技術簡介

比較原生黑色與紅色光阻及其廢液之物理、化學、光學性質及塗佈間差異,再利用化學分析與調配方式,可獲得再生黑色與紅色光阻。

Abstract

Confirm the difference of between original black, red photoresists and wastes, and use the analysis and adjustment to getting black, red photoresists

技術規格

STN製程之黑色感光樹脂,其光學密度需達2.0@1μm;及用於TFT製程之黑色感光樹脂,其光學密度達3.0@1μm。

Technical Specification

The optical density (O.D.) value of black photoresist at 1μm is 2.0 in the STN process, and is 3.0 in the TFT process

技術特色

經再生程序所產生再生黑色與紅色光阻,經實際機台驗證,其物理、化學、塗佈等性質,均與原生黑色與紅色光阻無明顯差異。

應用範圍

1.光電廠、2.彩色濾光片廠、3.高價光電化學品回收商

接受技術者具備基礎建議(設備)

1.光電廠等級的無塵室(class 1000以上) 2.具回收光阻液之塗佈機台與再生光阻設備

接受技術者具備基礎建議(專業)

1.化學分析知識 2.判斷光阻的物理、化學、塗佈等性質的專業知識

技術分類 02 N空氣污染防治

聯絡資訊

聯絡人:楊炎勝 空污防制與安全技術組

電話:+886-3-5919073 或 Email:victor_yang@itri.org.tw

客服專線:+886-800-45-8899

傳真:+886-3-5820270

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