『您的瀏覽器不支援JavaScript功能,若網頁功能無法正常使用時,請開啟瀏覽器JavaScript狀態』

跳到主要內容區塊

工業技術研究院

:::

技術名稱: 自旋磁性記憶體技術

技術簡介

針對未來的高容量/記憶單元密度所需的微縮尺寸磁性記憶體單元進行研究。並發展相關所需的製程技術及改善磁性記憶體的磁性薄膜材料與結構。

Abstract

Non-volatile MRAM (magnetic random access memory) technology has recently made a significant progress, and its manufacturability has been proven. For 65 nm technology node and beyond, however, MRAM based on Stoner-Wohlfarth and Toggle Switching has to overcome the scalability challenge, as writing currents for field generation will drastically increase and data retention will be degraded. Spin-RAM concepts are promising candidates that offer a solution.

技術規格

‧ 自旋磁性記憶體,磁阻變化率(MR Ratio)≧40%;等效阻值(RA)≦20 Ω-μm^2;MTJ元件短邊≦0.1μm; 臨界寫入電流密度(Jco)≦3E6A/cm^2

Technical Specification

‧ Spin-RAM, MR Ratio ≧40%, RA ≦20 Ω-μm^2, MTJ Size (Short side) ≦ 0.1μm, Jco≦3E6A/cm^2。

技術特色

工研院電光所自2000年深次微米計畫完成階段性任務後,即積極尋找具市場潛力之前瞻技術題目,於2002年選擇新世代非揮發性記億體投入前瞻研究,MRAM為其中一個題目,因MRAM技術符合我國業界需求,於2003年啟動關鍵計畫,同時也與業界開始MRAM合作計畫,在計畫期間陸續產出多項突破創新之技術,並獲國際肯定,獲刊於電子領域最著名之期刊 ( 2篇IEDM,3篇ITC ),並於2006年啟動第二代MRAM (Spin-RAM ) 之構想可性前瞻技術,僅花費一年的期間利用元件結構設計將寫入電流密度從20 MA/cm2降至2 MA/cm2,降幅達10倍,逼近國際水準(國際領先指標為1MA/cm2)。

應用範圍

‧ Smart Cellular Phone ‧ Digital Camera, PDA ‧ Embedded Memory ‧ Portable USB Drive ‧ Ultimate Memory

接受技術者具備基礎建議(設備)

‧ MRAM PVD ‧ MRAM Etcher ‧ Magnetic Furnace ‧ MRAM Tester ‧ 其它 CMOS 製程相關設

接受技術者具備基礎建議(專業)

‧ 半導體製程能力 ‧ IC電路設計 ‧ 記憶體應用設計

技術分類 製程

聯絡資訊

聯絡人:鍾佩翰 奈米電子技術組

電話:+886-3-5912777 或 Email:stephen.chung@itri.org.tw

客服專線:+886-800-45-8899

傳真:+886-3-5917690

[{"text":"企業網","weight":13.0},{"text":"材化所","weight":11.5},{"text":"機械所","weight":10.0},{"text":"綠能所","weight":9.4},{"text":"生醫所","weight":8.0},{"text":"半導體","weight":6.2},{"text":"南分院","weight":5.0},{"text":"太陽能","weight":5.0},{"text":"課程","weight":5.0},{"text":"遠紅外線","weight":5.0},{"text":"雷射","weight":4.0},{"text":"LED","weight":4.0},{"text":"LED可見光","weight":3.0},{"text":"5G","weight":3.0},{"text":"工研人","weight":3.0},{"text":"電光所","weight":3.0},{"text":"綠能與環境研究所","weight":3.0},{"text":"機械","weight":3.0},{"text":"資通所","weight":2.0},{"text":"面板","weight":2.0},{"text":"文字轉語音","weight":2.0},{"text":"實習","weight":2.0},{"text":"無人機","weight":2.0},{"text":"生醫","weight":2.0},{"text":"3D","weight":2.0},{"text":"v2x","weight":2.0},{"text":"員工","weight":2.0},{"text":"地圖","weight":2.0},{"text":"太陽光電","weight":2.0},{"text":"材料與化工研究所","weight":1.0}]