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工業技術研究院

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技術名稱: 核凝成長濕式靜電集塵器

技術簡介

–微粒核凝成長元件:利用微粒核凝成長,提升深次微米微粒之收集效率。並利用廢氣本身之高溫來產生蒸氣,不需外加能源及可達到核凝之效果。 –勻水膜集塵元件:不會有部分乾燥的槽道現象,可提升微粒之集塵效率 –改良之電暈放電元件:避免放電電極被微粒附著、避免短路及火花

Abstract

-Particle condensation growth by ultra-saturated steam at high temperature. -Porous collection electrode with uniform water film. -Modified corona discharge wire.

技術規格

廢氣溫度:>150℃,微粒處理粒徑範圍:0.01μm~10μm,微粒處理效率:100nm之效率>90%,處理廢氣風量範圍:30~250 lpm。

Technical Specification

Temperature of waste gas: >150℃, Removed particle size: 0.01μm~10μm, Removed efficiency: removed efficiency for diameter100nm >90%, Flow rate of waste gas: 30~250 lpm.

技術特色

‧細微粒去除效率高:利用微粒核凝成長,提升深次微米微粒之收集效率。 ‧微粒處理粒徑範圍廣:0.01μm~10μm ‧可同時處理乾式粉塵及高濕度、酸性及黏稠性微粒 ‧集塵電極板形成均勻水膜,不會有部分乾燥的槽道現象,微粒可經由連續之水流移除,水膜之用水量較省

應用範圍

光電、半導體業之薄膜製程及乾蝕刻製程所排放之廢氣處理

接受技術者具備基礎建議(設備)

廢氣處理設備

接受技術者具備基礎建議(專業)

熟悉高科技業之製程氣體處理

技術分類 02 N空氣污染防治

聯絡資訊

聯絡人:陳姿名 空污防制與安全技術組

電話:+886-3-5915026 或 Email:tina_mhc@itri.org.tw

客服專線:+886-800-45-8899

傳真:+886-3-5820378

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