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工業技術研究院

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技術名稱: MEMS元件機電整合設計技術

技術簡介

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Abstract

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技術規格

1.利用FEM結果計算電容變化之感測靈敏度 Test key與設計誤差≦±10% 靜態模擬誤差≦±10% 動態模擬誤差≦±10%

Technical Specification

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技術特色

建立電容式感測元件與感測電路schematic-based co-simulation設計平台,以縮短設計時間提升設計效率。

應用範圍

1.可應用於智慧感測元件之結構與讀取電路機電整合設計

接受技術者具備基礎建議(設備)

曝光機、蝕刻機、Coventorware、ANSYS

接受技術者具備基礎建議(專業)

半導體、材料、物理及電子等相關背景

技術分類 奈米與微機電

聯絡資訊

聯絡人:陳國彰 微系統中心

電話:+886-6-3847136 或 Email:kerwin_c@itri.org.tw

客服專線:+886-800-45-8899

傳真:+886-6-3847294

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