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工業技術研究院

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技術名稱: 層流型無塵室之氣流供應系統

技術簡介

目前工業界高潔淨度無塵室為了有效排除製程污染,提高製程良率,大量採用全覆蓋式的風機濾網機組搭配高架孔洞回風地板來製造層流型氣流場,大型無塵室動輒上萬台的風機濾網機組使用量於耗電與維修費用均相當驚人,本專利是為了大幅降低無塵室潔淨氣流供風耗電量與維修製造成本,並同時兼顧無塵室氣流品質。

Abstract

At present the industrial high purity cleanroom in order to effectively remove the system regulation pollution, enhances system the quality of manufacture process, so uses the entire cover -like air filter unit to match the high structure hole to return to the wind floor to make the laminar to be mad the flow field, the large-scale cleanroom frequently up to ten thousand Taiwan‘s air filter unit amount of use electric consumption and the maintenance cost quite are astonishing, this patent is in order to reduce the cleanroom pure air quality for the windage electric quantity and the service production cost, and simultaneously gives dual attention to cleanroom air quality.

技術規格

none

Technical Specification

none

技術特色

1.以線型風道搭配風機、高效率濾網、高架孔洞地板建立層流型氣流場有兩種型態,無塵室外部氣流系統類似FFU外部氣流系統,地板回風混合外氣導入天花板上方成為風機進氣氣流,氣流進入上方風機後導入線型風道中再穿透濾網到達無塵室工作區間。 2.無塵室建置空間受限時的解決方法,風道風機安裝位置位於高架地板下方,可作為回風動力來源,外氣亦導入高架地板下方與循環氣流混合,再由風機送至垂直風管中,進入線型風道後再穿透濾網到達無塵室工作區間。

應用範圍

1.原無塵室需局部區域提升Class級數者如Stocker、minienvironment…等 2.TFT、LED、半導體等具無塵室之廠房

接受技術者具備基礎建議(設備)

風管與擴散出風口之板金加工設備、風機製造設備

接受技術者具備基礎建議(專業)

空調系統設計、通風系統管路設計、潔淨室設計

技術分類 02 J空調設備研究

聯絡資訊

聯絡人:吳世國 節能設備技術組

電話:+886-3-5915377 或 Email:ShihKuoWu@itri.org.tw

客服專線:+886-800-45-8899

傳真:+886-3-5829930

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