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工業技術研究院

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技術名稱: 無塵室空氣採樣裝置

技術簡介

攜帶方便、抗污染且低污染釋放而可在半導體廠無塵室內使用的採樣器

Abstract

A portable and practical air sampler is designed for semiconductor industry clean room field application. The device is anti-pollution from contamination and emits very low level of contaminants.

技術規格

包含電池、抽氣泵、採樣管、連接管、至少1個採樣衝擊瓶(內含液體採樣介質)以及密閉封裝的裝置外殼。

Technical Specification

The sampling device includes a battery, a sampling pump, a sampling tube, connecting tubes, at least 1 impinger bottle(including liquid sampling media) and a sealed container.

技術特色

可在無塵室內使用的採樣模組,具備高度可攜性,容易操作設定;不受採樣環境污染干擾,且不逸散污染物;自供電源可長時間連續操作,不受現場供應電源的限制。

應用範圍

高潔淨度無塵室內空氣樣品採樣分析

接受技術者具備基礎建議(設備)

具有無塵室使用空氣污染採樣分析設備行銷經驗者

接受技術者具備基礎建議(專業)

儀器分析、電子設備維護能力

技術分類 01 綠能環境

聯絡資訊

聯絡人:宋隆佑 永續環境技術組

電話:+886-6-3632669 或 Email:leosung@itri.org.tw

客服專線:+886-800-45-8899

傳真:

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