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工業技術研究院

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技術名稱: 矽薄膜太陽電池用之透明導電玻璃製作技術

技術簡介

有別於一般只考慮可見光透光性與導電性質功能規格,矽薄膜太陽電池所需之透明導電玻璃基板,其還需要考量到表面的粗糙度,本技術即針對非晶矽或串接型太陽能電池所需之不同粗糙度以及光電特性或盛至是客製化之要求,以增進矽薄膜太陽電池效率。

Abstract

The visible light transmittance and electrical conductivity are generally to evaluate the quality of transparent conductive glass. However, we should consider more properties, such as surface roughness, especially for the silicon thin film solar cells. This technology could provide the optimum or customer design TCO glass for improving the performance of the device.

技術規格

1. 透明導電膜透光性大於80% (@400~1100nm) 2. 霧度範圍介於10~25% (@2.5 um) 3. 片電阻小於15ohm/□

Technical Specification

1. Optical transmission>80% @400nm~1100nm average. 2. Haze on demand. 10~25 % tunable with THKs<2.5um. 3. Rs<15ohm/□

技術特色

1. 霧度可調整之透明導電玻璃 2. 創新之氣體導流結構設計,將反應氣體有效分隔且均勻的分佈於基板上方混合沉積 3. 使用退火處理使得透明導電玻璃具有更佳之光電特性

應用範圍

太陽能電池,觸控面板等

接受技術者具備基礎建議(設備)

1. 低壓化學氣相沉積系統或 2.真空磁控濺鍍系統及濕蝕刻機

接受技術者具備基礎建議(專業)

薄膜工程

技術分類 01 綠能環境

聯絡資訊

聯絡人:郭明村 太陽光電技術組

電話:+886-6-3636818 或 Email:KnK.Kuo@itri.org.tw

客服專線:+886-800-45-8899

傳真:

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