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工業技術研究院

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技術名稱: 高頻非接觸式大面積表面電阻量測技術

技術簡介

應用高頻共振腔感應具有介電特性之材料之電性,可用於測試ITO、ZnO、FTO等透明導電之材料之電性,且經由自動化系統可以將樣品之表面電性分佈呈現,提供製程穩定性之參考數據

Abstract

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技術規格

表面電阻量測範圍10^-2 ~ 10^5 ohm,薄膜厚度<100nm需鍍在高介電基板上,量測試片範圍6inch(Max)

Technical Specification

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技術特色

none

應用範圍

ITO、AZO、FTO等透明導電薄膜之電性檢測

接受技術者具備基礎建議(設備)

網路分析儀

接受技術者具備基礎建議(專業)

材料、物理

技術分類 無機材料

聯絡資訊

聯絡人:陳炯雄 電子材料及元件研究組

電話:+886-3-5915185 或 Email:JanShinChen@itri.org.tw

客服專線:+886-800-45-8899

傳真:+886-3-5820206

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