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工業技術研究院

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技術名稱: 連續濺鍍太陽能集熱板製程技術

技術簡介

太陽能陽能集熱板之捲對捲(Roll-to-Roll)連續濺鍍製程技術包括連續濺鍍原型機台的測試、連續濺鍍原型機台連續穩定製程調校、連續濺鍍製程機台建置改善與完成連續濺鍍製程運轉技術開發。製程測試所使用的銅載片寬幅為12 cm,捲筒腔體荷重可承載300 kg。在穩定製程測試中,製程線速可達100 cm/min,並可連續穩定濺鍍100 m長度之鋁/氮化鋁選擇性吸收膜,其吸收率可達0.93、放射率為0.08~0.09之間。

Abstract

This technology presents a roll-to-roll process for sputtering solar selective absorber coatings. The process is based on continuous prototype sputter. The adjustment technology and stability from continuous process are developed. The width of testing substrate is 12 cm and roller’s loading is 300 kg. The stable throughput can be achieved under 100 cm/min. The long-length testing for every run is 100 m. In the development of roll-to-roll sputtering, the solar selective absorber (Al/AlN) film have good solar absorptance of 0.93 and low thermal emittance of 0.08.

技術規格

連續濺鍍製程線速可達100 cm/min 吸收率0.9;放射率0.1 自動化覆膜技術

Technical Specification

Throughput: 100 cm/min Absorptance: 0.9; emittance0.1 Automatic covering technology

技術特色

連續濺鍍製程線速可達100 cm/min 吸收率0.9;放射率0.1 自動化覆膜技術

應用範圍

太陽熱能應用產業、太陽能熱水器製造商、真空濺鍍代工廠

接受技術者具備基礎建議(設備)

太陽能集熱片製造、具真空濺鍍設備者佳。

接受技術者具備基礎建議(專業)

機械控制、濺鍍鍍製程等相關經驗。

技術分類 01 綠能環境

聯絡資訊

聯絡人:張秉宏 新能源應用技術組

電話:+886-3-5913370 或 Email:csw92@itri.org.tw

客服專線:+886-800-45-8899

傳真:+886-3-5820030

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