『您的瀏覽器不支援JavaScript功能,若網頁功能無法正常使用時,請開啟瀏覽器JavaScript狀態』

跳到主要內容區塊

工業技術研究院

:::

技術名稱: 平面基板狹縫塗佈設備技術

技術簡介

完成精密狹縫塗佈設備開發,該設備用於平面基板高均勻度溼式塗佈製程。此設備採用龍門移動式設計,強化製程可靠度。已驗證之塗料包括光阻、導電高分子、硬化塗層、光學膠、銅銦鎵氧化物漿料等。

Abstract

Precision slit coater has been well developed which is used for wet coating process with high uniformity on a flat substrate. The slit coater is gantry-moving designed that would enhance the process stability. Verified coating materials include photoresist, conductive polymer, hard coat, optical clear resin, CIG oxidation slurry and so on.

技術規格

基板尺寸: 370mm x 470mm 膜厚範圍:0.2μm~200μm 最佳膜厚均勻度:±3% 最大塗速:10m/min

Technical Specification

Sub. Size: 370mm x 470mm, Thickness: 0.2μm ~ 200μm, Thickness variation: ±3% (best), Coating speed: 10m/min

技術特色

完成精密狹縫塗佈設備開發,該設備用於平面基板高均勻度溼式塗佈製程。本製程設備採用預計量式塗佈方式,封閉供料系統,可節省塗料及保持塗料品質,故獲得高品質塗膜成品。

應用範圍

舉凡須在平面基板完成高品質塗膜之製程,皆可適用,包括平面顯示器製程、觸控面板製程、背光模組、透明導電基板,太陽能製程等產業

接受技術者具備基礎建議(設備)

高速同步運動控制模組、高精度運動模組、供料模組、塗佈模具

接受技術者具備基礎建議(專業)

精密機械設計人才、電控設計人才、化學化工人才

技術分類 精密機械

聯絡資訊

聯絡人:謝志瑋 先進製造核心技術組

電話:+886-3-5913904 或 Email:cwhsieh@itri.org.tw

客服專線:+886-800-45-8899

傳真:+886-3-5820043

[{"text":"企業網","weight":13.0},{"text":"材化所","weight":11.5},{"text":"機械所","weight":10.0},{"text":"綠能所","weight":9.4},{"text":"生醫所","weight":8.0},{"text":"半導體","weight":6.2},{"text":"南分院","weight":5.0},{"text":"太陽能","weight":5.0},{"text":"課程","weight":5.0},{"text":"遠紅外線","weight":5.0},{"text":"雷射","weight":4.0},{"text":"LED","weight":4.0},{"text":"LED可見光","weight":3.0},{"text":"5G","weight":3.0},{"text":"工研人","weight":3.0},{"text":"電光所","weight":3.0},{"text":"綠能與環境研究所","weight":3.0},{"text":"機械","weight":3.0},{"text":"資通所","weight":2.0},{"text":"面板","weight":2.0},{"text":"文字轉語音","weight":2.0},{"text":"實習","weight":2.0},{"text":"無人機","weight":2.0},{"text":"生醫","weight":2.0},{"text":"3D","weight":2.0},{"text":"v2x","weight":2.0},{"text":"員工","weight":2.0},{"text":"地圖","weight":2.0},{"text":"太陽光電","weight":2.0},{"text":"材料與化工研究所","weight":1.0}]