工業技術研究院

技術簡介

目前現有的光學監測技術，FTIR乃具有即時、多物種監測之優點，以Open-path FTIR 是最適合用於廣域多物種的即時監測技術。如前述微污染即時監測技術的主體為回風區Open-FTIR監測。 由於每種氣體分子均有其特定之紅外光吸收特性，在紅外光束通過潔淨室廣域的量測區域時，特定氣體分子將會吸收特定波長的光，使得光束在此波段之強度減弱。吸收前後之光強度比值之吸收度將與氣體的濃度直接相關。測量氣體樣品的特定吸收波段及強度，便可得知氣體中所含的成分及濃度。紅外光譜儀所取得之紅外吸收光譜後，需要一可自動定量、定性的智慧模組，自動將取得的光譜轉換為對應的化學物質種類、及濃度趨勢。

Abstract

Gases emitted from the industrial source such as stacks emission or accidental leaks of process gases are difficultly to be detected with traditional sensors. Instead, infrared absorption spectroscopy is a useful and efficient instrumentation to detect these trace gases which are emitted directly into environment. The machine interpretation of such kind of infrared spectroscopy is still a bottleneck in aspect of building up a reliable on-line analysis while using infrared technology. When all species appeared in the infrared spectrum have been identified, one can easily build the calibration matrix based on the well established chemometrics technique such as CLS (Classical Least Square), PLS (Partial Least Square) or PCR (Principal Component Regression) methods to calculate the concentrations of all detected components. The difficulty of building an auto-detection system of infrared spectroscopy remains in identifying all the chemical species in the unknown infrared spectrum without the help of human experts. In this technology, we will present an advanced algorithm based on continuous wavelet transform theory to facilitate the automatic identification of gas components in the infrared spectrum of unknown samples.

技術規格

(1)可同時監測380種以上光電、半導體製程及其副產物，包含SF6、CF4、NF3、N2O及C2F6等氣體。 (2)具有系統自動背景校正功能，去除長時間監測之訊號漂移問題。 (3)自動定性模組1套，單一污染物鑑別率準確度應大於等於90％，混合多物種鑑別率準確度應大於等於80％。 (4)自動定量系統模組1套。

Technical Specification

(1) Automatic qualification monitor more 380 spectroscopy such as SF6, CF4, NF3, N2O and C2F6. (2)There is automatic background of systems. (3) Automatic qualification system, accuracy of single pollutants should be greater than 90％, accuracy of mix compound should be greater than 80％. (4) Automatic quantification system.

技術特色

目前市售的商用分析現有軟體的缺點在於誤判率高，長期量測下，baseline的偏移將嚴重影響其定性、定量結果。並且現有軟體必需仰賴專業操作人員設定圖譜計算參數，就設定值進行特定物種的定量分析。通常一次可定量氣體種類通常不超過10種。

應用範圍

高科技半導體、光電廠區空氣品質監測

接受技術者具備基礎建議（設備）

傅立葉紅外線光譜儀(FTIR, Fourier Transform Infrared. Spectroscopy).設備，涵蓋開徑式(open path)或閉徑式(extractive)

接受技術者具備基礎建議（專業）

高科技半導體、光電廠區空氣品質監測，微污染監控專業能力

聯絡資訊