『您的瀏覽器不支援JavaScript功能,若網頁功能無法正常使用時,請開啟瀏覽器JavaScript狀態』

跳到主要內容區塊

工業技術研究院

:::

技術名稱: 智慧型多點採樣FTIR氣體分析技術

技術簡介

建置光電半導體產業所使用之FTIR多點採樣氣體即時診斷系統,將只有定點分析能力的FTIR氣體分析儀,透過多點採樣的控制機構,能夠支援到跨越空間的多點採樣與分析模式。如此在有分隔牆的空間,可以同時監控不同空間中的污染程度。

Abstract

Develop the real-time multi-ports FTIR gas analyzer which is aimed to be used in the semiconductor industry.

技術規格

採樣點 : 8 - 40 點 偵測下限: 對於大多數氣體 1-10 ppm 單點可監測物種 : 最多可達20種 採樣速度 : 每15 秒 一點 可監測氣體種類 : 揮發有機性, PFC, CFC, HFC, NF3 與一些無機性氣體 具備自動定性定量功能

Technical Specification

Sampling points : 8 - 40 points Detection limit : ppm level for most of gases single point : Monitoring species for a up to 20 Sampling speed : 15 sec for a single point Gases monitored : Organic, PFC, CFC, HFC, NF3 and many other inorganic gases Automatic qualitative and quantitative function

技術特色

利用FTIR氣體分析儀可同時分析數百種氣體的能力,透過自動定性定量與多點採樣分配技術,同時監測10 - 40個不同空間點的氣體洩漏程度。

應用範圍

光電半導體場環境敏感點,閥件盒(VMB)與氣體櫃(Cabinet)毒害性氣體洩漏偵測

接受技術者具備基礎建議(設備)

FTIR紅外光譜儀,PLC控制設備

接受技術者具備基礎建議(專業)

FTIR氣體分析儀組裝能力,自動控制系統組裝能力

技術分類 01 綠能環境

聯絡資訊

聯絡人:賴宇倫 空污防制與安全技術組

電話:+886-3-5914703 或 Email:yulunlai@itri.org.tw

客服專線:+886-800-45-8899

傳真:+886-3-5820378

[{"text":"企業網","weight":13.0},{"text":"材化所","weight":11.5},{"text":"機械所","weight":10.0},{"text":"綠能所","weight":9.4},{"text":"生醫所","weight":8.0},{"text":"半導體","weight":6.2},{"text":"南分院","weight":5.0},{"text":"太陽能","weight":5.0},{"text":"課程","weight":5.0},{"text":"遠紅外線","weight":5.0},{"text":"雷射","weight":4.0},{"text":"LED","weight":4.0},{"text":"LED可見光","weight":3.0},{"text":"5G","weight":3.0},{"text":"工研人","weight":3.0},{"text":"電光所","weight":3.0},{"text":"綠能與環境研究所","weight":3.0},{"text":"機械","weight":3.0},{"text":"資通所","weight":2.0},{"text":"面板","weight":2.0},{"text":"文字轉語音","weight":2.0},{"text":"實習","weight":2.0},{"text":"無人機","weight":2.0},{"text":"生醫","weight":2.0},{"text":"3D","weight":2.0},{"text":"v2x","weight":2.0},{"text":"員工","weight":2.0},{"text":"地圖","weight":2.0},{"text":"太陽光電","weight":2.0},{"text":"材料與化工研究所","weight":1.0}]