工業技術研究院

技術簡介

一種氫氣回收系統與發電系統。此氫氣回收系統適於自含有氫氣、氨氣與其他氣體的廢氣中回收氫氣。此氫氣回收系統包括吸附裝置、氨氣分解裝置以及濾氫裝置。吸附裝置用以吸附廢氣中的上述其他氣體。氨氣分解裝置與吸附裝置連接，用以將氨氣分解為氮氣與氫氣。濾氫裝置與氨氣分解裝置連接，用以分離氮氣與氫氣。發電系統適於利用含有氫氣、氨氣與其他氣體的廢氣中的氫氣發電。此發電系統包括燃料電池以及上述的吸附裝置與氨氣分解裝置。燃料電池與氨氣分解裝置連接。

Abstract

A hydrogen recycling system and a power generating system are provided. The hydrogen recycling system is suitable for recycling hydrogen from a waste gas containing hydrogen, ammonia and other gases. The hydrogen recycling system includes an adsorption apparatus, an ammonia decomposer and a hydrogen filter. The adsorption apparatus is used to adsorb the other gases in the waste gas. The ammonia decomposer is connected to the adsorption apparatus and is used to decompose ammonia into nitrogen and hydrogen. The hydrogen filter is connected to the ammonia decomposer and is used to separate nitrogen and hydrogen. The power generating system is suitable for generating power by using hydrogen in the waste gas containing hydrogen, ammonia and other gases. The power generating system includes a fuel cell, the adsorption apparatus and the ammonia decomposer. The fuel cell is connected to the ammonia decomposer.

技術規格

半導體製程廢氣(如SiH4, Si2H6等)吸附效率＆gt;99.9％，氨氣降解率＆gt;99.9％，氫氣純度＆gt;85％，可銜接燃料電池發電裝置

Technical Specification

Efficiency of the exhaust process gases adorption＆gt;99.9％; Ammonia decomposition efficiency ＆gt; 99.9％; Hydrogen concentration ＆gt;85％ in the purified gas; Applicable to fuel cell power generation.

技術特色

本專利內容同時具備製程廢氣(如SiH4, Si2H6, NH3, H2)淨化與發電功能；在淨化上述廢氣過程後，可取得殘餘氫氣與氮氣之產物，藉由結合(亦可不結合)濾氫薄膜與燃料電池，讓此廢氣處理系統又同時具備發電功能，是前案所沒有的進步性。

應用範圍

半導體、光電、化工

接受技術者具備基礎建議（設備）

半導體製程尾氣處理裝置，燃料電池，氣體吸附設備

接受技術者具備基礎建議（專業）

具半導體製程尾氣處理經驗，燃料電池應用廠商，廢氣處理

聯絡資訊