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工業技術研究院

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技術名稱: 氣體洩漏判別方法及系統

技術簡介

本發明以特殊設計之時序數值分析方法分析一連串化學監測之連續時序監測訊號後,以偵測是否有由製程機台所導致的洩漏事件發生之與否。對於系統判定由製程機台所導致之微污染事件,可進一步比對機台製程資料庫與即時之機台運作時間,鎖定造成該微污染事件之對應機台,在最短時間內解決微污染事件對生產所造成之影響。

Abstract

Method for Detection of Leak Event in the Time Series of Chemical Sensing Signals

技術規格

當兩個事件具有以下條件時,視為同一來源之事件: (1)其事件發生時間(終止時間減去起始時間)相差15%以內。 (2)兩個事件之Correlation 係數大於0.5以上。 洩漏係數= 所有重複數大於3之事件種類重複次數之總和

Technical Specification

When two events with the following conditions, the event as same source: (1) The start and end time difference of events less than 15%. (2) Correlation coefficient of the two events is greater than 0.5 or more. Leakage coefficient = all repeat count is greater than the sum of 3 repetitions.

技術特色

本方法首先利用數值分析分析原始訊號後,試圖區分出每一個訊號高低變化所代表的事件單體後,再比較各個事件單體是否有其相似度。如果事件為相似度很高之重複事件者,其來自機台洩漏的機率相對高出許多。

應用範圍

具有重複性製程,如高科技廠房洩漏監測。

接受技術者具備基礎建議(設備)

Open-path FTIR監測設備

接受技術者具備基礎建議(專業)

高科技廠房微污染概念

技術分類 工程與自動化研究

聯絡資訊

聯絡人:許榮男 環境與安全技術組(N)

電話:+886-3-5915033 或 Email:JNHsu@itri.org.tw

客服專線:+886-800-45-8899

傳真:+886-3-5820378

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